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MSP Unveils Turbo II™ Vaporizers

MSP Turbo II Vaporizers
Written by Kirsten Campbell

The future of vapor delivery systems for CVD and ALD processes

MSP, a Division of TSI®, is thrilled to announce the launch of the new line of MSP Turbo II™ Vaporizers. Engineered for chemical vapor deposition (CVD) and atomic layer deposition (ALD) applications in semiconductor device fabrication and industrial coatings, these revolutionary vaporizers are suitable for a wide range of liquid precursors, even thermally sensitive and low vapor pressure liquids.

Twice the Output, Half the Size

Inspired by breakthroughs in the science of droplet atomization and evaporation, these innovative vaporizers are half the physical footprint of earlier versions, while delivering a staggering 200% increase in vapor output.

“Innovation in heat transfer efficiency, combined with optimization of droplet atomization has resulted in the ability to drive higher vapor outputs, while still ensuring highly stable and reliable concentration profiles,” said Darrick Niccum, President of MSP. “This technology can increase throughput while simultaneously improving process repeatability. The optimized design also reduces downtime, which leads to significantly lower total cost of ownership (TCO) in semiconductor process tools.”

Higher vapor concentrations and fast vapor stabilization rates enable faster deposition and etch times, reducing both wafer processing time and liquid waste. This, combined with a long lifetime and low maintenance requirements, results in significant cost savings over the life of the equipment or system.

MSP, a Division of TSI | tsi.com/msp

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Kirsten Campbell is a Marketing Tornado and junk robot of information. Analytical and creative, she has been in marketing and communications since 2008 and worked with everyone from small businesses to your favorite household names. 

 

Ask her about the time she made a numismatics blog interesting (yes, really) or wrote an obit for a family she never met.

 

An ardent admirer of corporate snark played out online, Kirsten loves Reese’s peanut butter cups and still isn't over the Mars Rover.

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MSP Unveils Turbo II™ Vaporizers

by Kirsten Campbell time to read: 1 min